4.4 Article

Striations in helicon-type argon plasma

期刊

PHYSICS OF PLASMAS
卷 28, 期 11, 页码 -

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AIP Publishing
DOI: 10.1063/5.0065771

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  1. National Natural Science Foundation of China [11975047]

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This paper presents two types of stationary striations in an argon helicon plasma source, and investigates their formation and features under different conditions. The results show that gas pressure affects the striation spacing, while magnetic field and RF power have less significant impact. These striations are suggested to be strongly related to the non-local effect of electron kinetics in the plasma channel with a weak electric field, and different pressures in downstream and antenna regions lead to different types of striations in the argon helicon plasma source.
In this paper, two types of stationary striations appearing in an argon helicon plasma source are presented. The formation and features of the striations were investigated experimentally under different conditions, including RF power, gas pressure, and external magnetic field. The results show that the striation spacing decreases as the gas pressure increases but does not change significantly along with the magnetic field and the RF power. It is suggested that these striations are strongly related to the non-local effect of electron kinetics in the plasma channel with a weak electric field. The different pressures in downstream and antenna regions will lead to different types of striations in an argon helicon plasma source.

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