4.5 Article

Electrically Pumped Epitaxially Regrown GaSb-Based Type-I Quantum-Well Surface-Emitting Lasers with Buried High-Index-Contrast Photonic Crystal Layer

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出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssr.202100425

关键词

cascade diode lasers; GaSb; mid-infrared; photonic crystal surface-emitting lasers; photonic crystals; regrowth

资金

  1. USA. Army Research Office Grant [W911NF1810057]
  2. USA. Department of Energy, Office of Basic Energy Sciences, through the Center for Functional Nanomaterials, Brookhaven National Laboratory [DE-SC0012704]
  3. U.S. Department of Defense (DOD) [W911NF1810057] Funding Source: U.S. Department of Defense (DOD)

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This study presents the epitaxially regrown PCSELs emitting at around 2 and 2.6 μm, showcasing the advantages of high-index-contrast photonic crystal layers. The devices achieved band-edge lasing and low threshold current densities, demonstrating potential for high-performance optoelectronic applications.
Epitaxially regrown electrically pumped photonic crystal surface-emitting lasers (PCSELs) emitting near 2 and 2.6 mu m are designed, fabricated, and characterized. A high-index-contrast photonic crystal layer is incorporated into the GaSb-based laser heterostructure by air-hole-retaining epitaxial regrowth. A square lattice of triangular holes is etched in the top waveguide core layer of the incomplete laser heterostructure. The nanopatterned surface is subsequently cleaned and regrown with AlGaAsSb p-cladding material. Transmission electron microscopy studies demonstrate uniform regrowth over the nanopatterned GaSb surface. The selected regrowth regimes yield a buried 2D array of elongated air-holes. The diode PCSELs based on moderately etched nanopatterns demonstrate band-edge lasing near 2 mu m up to room temperatures. The cascade diode PCSELs operate near 2.6 mu m with minimum threshold current densities of about 500 A cm(-2) achieved at 180 K. The devices generate mW level output in narrow divergence beam emitted from the window in substrate contact. The angle-resolved electroluminescence measurements reveal a four-sub-band band structure with an apparent photonic bandgap corresponding to the buried high-index-contrast square photonic crystal layer. The PCSELs made of heterostructures supporting two modes in the vertical direction demonstrate two sets of sub-bands showing anti-crossing-like interaction.

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