期刊
OPTICS LETTERS
卷 47, 期 5, 页码 1238-1241出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.449475
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资金
- National Natural Science Foundation of China [12074170, 62004088]
- HKSAR Research Grants Council (RGC) Early Career Scheme [27202919]
- Shenzhen Natural Science Foundation Stability Support Program Project [20200925160044004]
- NSQKJJ [K21799120]
A compact optical inclinometer in subcentimeter size is proposed, using a GaN-on-sapphire chip and a spherical glass cavity containing ethanol for angle measurement. The developed inclinometer exhibits high sensitivity and resolution in a wide linear range from -40 to +40 degrees, with excellent repeatability and stability confirmed through dynamic experiments.
In this Letter, a compact optical inclinometer in subcentimeter size is proposed and demonstrated. A 1x1 mm(2) GaN-on-sapphire chip composed of a light-emitting diode and photodetector is fabricated through wafer-scale processes and integrated with a spherical glass cavity with a diameter of 5 mm, which contains ethanol as a liquid pendulum. When applying inclinations relative to the horizon, the extent to which the chip is immersed in ethanol changes, thereby altering the amount of light received by the on-chip detector. The underlying mechanisms of angle-dependent reflectance characteristics at the sapphire boundary are identified, and the measured photocurrent signal can be used as quantitative readouts for determining the angle of inclination from -60 to +60 degrees. A linear response with a sensitivity of 19.4 nAP and an estimated resolution of 0.003 degrees is obtained over a wide linear range from -40 to +40 degrees. Verified by a series of dynamic experiments, the developed inclinometer exhibits a high degree of repeatability and stability, which paves the way for its widespread usage and applications. (C) 2022 Optica Publishing Group
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