相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Broadband thermomechanically limited sensing with an optomechanical accelerometer
Feng Zhou et al.
OPTICA (2021)
A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz1/2 Noise Floor
Chun Zhao et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2019)
A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process
Kang Rao et al.
MICROMACHINES (2019)
Opto-mechanical lab-on-fibre seismic sensors detected the Norcia earthquake
Marco Pisco et al.
SCIENTIFIC REPORTS (2018)
A nano-g micromachined seismic sensor for levelling-free measurements
Wenjie Wu et al.
SENSORS AND ACTUATORS A-PHYSICAL (2018)
MEMS Fabry-Perot optical accelerometer employing mechanical amplification via a V-beam structure
Edward Davies et al.
SENSORS AND ACTUATORS A-PHYSICAL (2014)
Optical-Fiber Accelerometer Array: Nano-g Infrasonic Operation in a Passive 100 km Loop
Ian C. M. Littler et al.
IEEE SENSORS JOURNAL (2010)
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
U. Krishnamoorthy et al.
SENSORS AND ACTUATORS A-PHYSICAL (2008)
分享论文
