4.6 Article

Telephoto- lens-based Optical Differentiation Wavefront Sensor for freeform metrology

期刊

OPTICS EXPRESS
卷 29, 期 23, 页码 38395-38403

出版社

Optica Publishing Group
DOI: 10.1364/OE.443558

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  1. National Science Foundation [1711669]
  2. Div Of Electrical, Commun & Cyber Sys
  3. Directorate For Engineering [1711669] Funding Source: National Science Foundation

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An Optical Differentiation Wavefront Sensor based on a telephoto lens system and binary pixelated filters is reported in this study, which can measure wavefronts with accuracy better than lambda/10 Root Mean Squared (RMS) at lambda=633 nm. The system shows a high tolerance to components alignment errors in experimental investigation.
We report an Optical Differentiation Wavefront Sensor based on a telephoto lens system and binary pixelated filters. It provides a five-fold reduction in the system length compared to a 4f system with identical effective focal length. Measurements of phase plates with this system are compared to measurements performed with a commercial low-coherence interferometer. The telephoto-lens-based system can measure wavefronts with accuracy better than lambda/10 Root Mean Squared (RMS) at lambda=633 nm. Experimental investigation shows that the system has a high tolerance to components alignment errors. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.

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