期刊
OPTICS EXPRESS
卷 30, 期 5, 页码 7831-7844出版社
Optica Publishing Group
DOI: 10.1364/OE.454169
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资金
- National Key Research and Development Program of China [2017YFA0701200]
- National Natural Science Foundation of China [52075100]
- Science and Technology Commission of Shanghai Municipality [19ZR1404600]
The wavefront deformation in the non-null test of optical freeform surface measurement was corrected using a wavefront propagation model, resulting in improved measurement accuracy. A freeform surface wavefront correction (FSWC) measurement system was established to validate the proposed method. Simulation and experimental studies showed that the proposed method effectively reduces the influence of wavefront deformation in space propagation, and the freeform surface form accuracy measured by FSWC can reach 10 nm RMS.
The non-null test to detect the modulated wavefront is a widely used method in optical freeform surface measurement. In this study, the wavefront deformation in the non-null test of an optical freeform surface measurement was corrected based on the wavefront propagation model to improve measurement accuracy. A freeform surface wavefront correction (FSWC) measurement system was established to validate the proposed method. Simulation and experimental studies indicated that the proposed method can reduce the influence of freeform surface wavefront deformation in space propagation. Moreover, the freeform surface form accuracy measured by FSWC can reach a root-mean-squared value of 10 nm. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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