4.6 Article

Sub-terahertz bandwidth capactively-loaded thin-film lithium niobate electro-optic modulators based on an undercut structure

期刊

OPTICS EXPRESS
卷 29, 期 25, 页码 41798-41807

出版社

OPTICAL SOC AMER
DOI: 10.1364/OE.442091

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资金

  1. National Key Research and Development Program of China [2018YFB2201701]
  2. National Natural Science Foundation of China [61822404, 61875104, 61904093, 61927811, 61974080, 61975093, 61991443]
  3. Key Lab Program of BNRist [BNR2019ZS01005]
  4. China Postdoctoral Science Foundation [2019T120090]
  5. Collaborative Innovation Centre of Solid-State Lighting and Energy-Saving Electronics

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A thin film lithium niobate electro-optic modulator based on partially removed benzocyclobutene bonding layer is proposed for sub-terahertz bandwidth. This design allows for low loss microwave transmission and high electro-optic modulation bandwidth, making it suitable for sub-terahertz operation.
A thin film lithium niobate (TFLN) electro-optic modulator based on a partially removed benzocyclobutene (BCB) bonding layer is proposed for sub-terahertz bandwidth. Lowloss microwave transmission is realized by periodic capacitively loaded travelling-wave electrodes (CL-TWEs) with an undercut structure, and the air-filled region beneath the modulator arms is adjusted to secure impedance and velocity matching. A low half-wave voltage length product of 1.2 V.cm can be achieved with 2-mu m-gap loaded electrodes, while the 3-dB electro-optic modulation bandwidth for 10 mm modulation length is estimated beyond 300 GHz, thus allowing sub-terahertz operation. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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