4.7 Article

Holographic Femtosecond Laser Parallel Processing Method Based on the Fractional Fourier Transform

期刊

OPTICS AND LASERS IN ENGINEERING
卷 146, 期 -, 页码 -

出版社

ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2021.106704

关键词

Holographic laser processing; Fractional Fourier transform; Fractional order; Zero order spot; Parallel beam

类别

资金

  1. National Natural Science Foundation of China [51775289]
  2. 111 Project [D21017]
  3. Major Basic Research Programme of the Natural Science Foundation of Shandong, China [ZR2018ZB0524]
  4. Key Research and Development Plan of Shandong, China [2019GGX104097]
  5. Qingdao Postdoctoral Applied Research Project
  6. Funding Project for Postgraduate International Training of Qingdao University of Technology

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This novel holographic femtosecond laser parallel processing method utilizes the fractional Fourier transform to increase flexibility and available space for processing, with computer-generated holograms and an iterative algorithm for uniformity and efficiency. By adjusting the femtosecond laser beam using a spatial light modulator, complex microstructures can be processed in parallel, with the zero-order beam spot defocused or utilized to improve laser energy utilization for various structures.
A novel holographic femtosecond laser parallel processing method based on the fractional Fourier transform is proposed, which increases the flexibility of the processing position of the parallel beam as well as the available space in the paraxial area. Computer-generated holograms are produced by combining the fractional Fourier transform and an iterative algorithm with excellent uniformity and diffraction efficiency. Parallel processing can be implemented for complex microstructures by adjusting the femtosecond laser beam using a spatial light modulator. The zero-order beam spot can be actively defocused by changing the fractional order method or exploited to fabricate various structures to improve laser energy utilization.

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