期刊
NANO LETTERS
卷 22, 期 4, 页码 1475-1482出版社
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c03498
关键词
Nanomechanics; Membranes; Complex oxides; Perovskites; Pressure sensors; NEMS
类别
资金
- European Union [881603]
- Quantox of QuantERA ERA-NET Cofund in Quantum Technologies
- Netherlands Organisation for Scientific Research (NWO/OCW) as part of the VIDI program
- [TKIHTSM/19.0172]
This work demonstrates the use of self-sealing membranes to seal the reference cavity beneath, improving the gas permeation time constant. The adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal.
Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membranesurface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO 3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据