Freeform Electronic and Photonic Landscapes in Hexagonal Boron Nitride

Atomically smooth hexagonal boron nitride (hBN) flakes have revolutionized two-dimensional (2D) optoelectronics. They provide the key substrate, encapsulant, and gate dielectric for 2D electronics while offering hyperbolic dispersion and quantum emission for photonics. The shape, thickness, and profile of these hBN flakes affect device functionality. However, researchers are restricted to simple, flat flakes, limiting next-generation devices. If arbitrary structures were possible, enhanced control over the flow of photons, electrons, and excitons could be exploited. Here, we demonstrate freeform hBN landscapes by combining thermal scanning-probe lithography and reactive-ion etching to produce previously unattainable flake structures with surprising fidelity. We fabricate photonic microelements (phase plates, grating couplers, and lenses) and show their straightforward integration, constructing a high-quality optical microcavity. We then decrease the length scale to introduce Fourier surfaces for electrons, creating sophisticated Moire patterns for strain and band- structure engineering. These capabilities generate opportunities for 2D polaritonics, twistronics, quantum materials, and deep- ultraviolet devices.

Automated summary

Atomically smooth hexagonal boron nitride (hBN) flakes have revolutionized two-dimensional (2D) optoelectronics by providing crucial components for electronic and photonic devices, with the potential for enhanced control over the flow of photons, electrons, and excitons through the demonstration of freeform hBN landscapes. By combining thermal scanning-probe lithography and reactive-ion etching, researchers have been able to fabricate previously unattainable flake structures, such as photonic microelements and Fourier surfaces for electrons, creating opportunities for advanced technologies such as 2D polaritonics, twistronics, quantum materials, and deep-ultraviolet devices.