期刊
MICROELECTRONICS RELIABILITY
卷 127, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2021.114412
关键词
3D integration; Low temperature bonding; Cu bonding; Hybrid bonding
资金
- Center for the Semi-conductor Technology Research from The Featured Areas Research Center Program
- Ministry of Science and Technology, Taiwan [MOST 110-2634-F-009-027-, MOST 109-2221-E-009-023-MY3, MOST 110-2221-E-A49-086-MY3]
Thermal-compression bonding (TCB) is crucial for vertical chip stacking in 3D integration, with copper (Cu) to Cu bonding being the preferred choice due to its excellent properties. However, issues such as wafer warpage and bonding misalignment are caused by the high thermal budget of the bonding process. Low temperature Cu/SiO2 hybrid bonding technology emerges as a solution to coplanarity and filling issues, promising great potential for ultra-high density interconnection in 3D integration.
Thermal-compression bonding (TCB) is the key technology to ensure vertical chip (or wafer) stacking in threedimensional (3D) integration with higher I/O density than conventional soldering technology. For different TCB approaches, copper (Cu) to Cu bonding has always been the preferred candidate due to the excellent electrical and thermal properties of Cu, high mechanical strength of bonding interface, as well as compatibility and cost consideration in the packaging fabrication. However, high thermal budget of the bonding process caused by oxidation of Cu leads to issue of wafer warpage, bonding misalignment, and compatibility with back-end-of-line process. Therefore, this review paper first presents an extensive survey on the advance of low temperature Cu based bonding technologies. In addition, the feasibility of Cu-Cu bonding in the fine pitch applications is challenged by coplanarity issue of Cu pillars and insufficient gaps for filling. Accordingly, based on the progress of low temperature Cu-Cu bonding, low temperature Cu/SiO2 hybrid bonding will be introduced as an emerging bonding technology to solve the coplanarity and filling issue, which can provide the great potential for 3D integration with ultra-high density of interconnection.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据