Synthesis of environment-friendly and label-free SERS probe for Iron(III) detection in integrated circuit cleaning solution waste

In this work, an environment-friendly and label-free SERS probe was synthesized through Tollens' reagent and phytic acid to detect Fe3+ ions in the integrated circuit cleaning solution waste. The synthesis process was greatly shortened to 30 min compared with the traditional synthesis time of 6 h. In addition, this SERS probe can be directly used and avoid the environmental pollution caused by the further modification in the synthesis process. This probe has a high sensitivity (LOD = 0.1 mu mol L-1) and a wide detection range from 0.5 mu mol L-1 to 500 mu mol L(-)1.As a practical application, it has been successfully applied to detect Fe(3+ )ions in the standard clean two solution (SC-2). This method provides a feasible detection way for whether integrated circuit cleaning solution waste meets the emission criteria.

Automated summary

In this study, an environmentally friendly and label-free SERS probe was synthesized to detect Fe3+ ions in integrated circuit cleaning solution waste. The probe has high sensitivity and a wide detection range, and has potential applications in evaluating whether the waste meets emission criteria.