4.5 Article

Transparent conductive properties of TiON thin films

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Review Materials Science, Multidisciplinary

Tunable optical materials for multi-resonant plasmonics: from TiN to TiON

Anton Kharitonov et al.

OPTICAL MATERIALS EXPRESS (2020)

Article Physics, Applied

β-TaON thin films: production by reactive magnetron sputtering and the question of non-stoichiometry

K. Salamon et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2019)

Article Chemistry, Physical

Electronic properties of beta-TaON and its surfaces for solar water splitting

Habib Ullah et al.

APPLIED CATALYSIS B-ENVIRONMENTAL (2018)

Article Materials Science, Coatings & Films

Visible-light photocatalytic activity of TiOxNy thin films obtained by reactive multi-pulse High Power Impulse Magnetron Sputtering

Alexandra Demeter et al.

SURFACE & COATINGS TECHNOLOGY (2017)

Article Physics, Applied

Amorphous ZnOxNy thin films with high electron Hall mobility exceeding 200 cm2 V-1 s-1

Takanori Yamazaki et al.

APPLIED PHYSICS LETTERS (2016)

Article Multidisciplinary Sciences

High mobility and high stability glassy metal-oxynitride materials and devices

Eunha Lee et al.

SCIENTIFIC REPORTS (2016)

Article Physics, Applied

ZnO:H indium-free transparent conductive electrodes for active-matrix display applications

Shuming Chen et al.

APPLIED PHYSICS LETTERS (2014)

Article Chemistry, Physical

High-Mobility Electron Conduction in Oxynitride: Anatase TaON

Atsushi Suzuki et al.

CHEMISTRY OF MATERIALS (2014)

Article Engineering, Electrical & Electronic

Scattering of electrons by ionized impurities in semiconductors: quantum-mechanical approach to third body exclusion

Dmitry Pozdnyakov

JOURNAL OF COMPUTATIONAL ELECTRONICS (2014)

Article Multidisciplinary Sciences

Anion control as a strategy to achieve high-mobility and high-stability oxide thin-film transistors

Hyun-Suk Kim et al.

SCIENTIFIC REPORTS (2013)

Article Physics, Applied

Intrinsic defects and electronic conductivity of TaON: First-principles insights

Shiyou Chen et al.

APPLIED PHYSICS LETTERS (2011)

Article Engineering, Electrical & Electronic

Transparent semiconducting Nb-doped anatase TiO2 films deposited by helicon-wave-excited-plasma sputtering

A. Fouda et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2011)

Article Physics, Applied

Effect of nitrogen doping on TiOxNy thin film formation at reactive high-power pulsed magnetron sputtering

Vitezslav Stranak et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2010)

Article Physics, Applied

High mobility amorphous zinc oxynitride semiconductor material for thin film transistors

Yan Ye et al.

JOURNAL OF APPLIED PHYSICS (2009)

Article Chemistry, Physical

Optical characterization of PLD grown nitrogen-doped TiO2 thin films

B. Farkas et al.

APPLIED SURFACE SCIENCE (2008)

Article Physics, Applied

Formation of TiOx films produced by high-power pulsed magnetron sputtering

Vitezslav Stranak et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2008)

Article Materials Science, Multidisciplinary

Sputtered Nb- and Ta-doped TiO2 transparent conducting oxide films on glass

Meagen A. Gillispie et al.

JOURNAL OF MATERIALS RESEARCH (2007)

Article Physics, Applied

Transport properties of d-electron-based transparent conducting oxide:: Anatase Ti1-xNbxO2

Yutaka Furubayashi et al.

JOURNAL OF APPLIED PHYSICS (2007)

Article Chemistry, Physical

Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process

Jean-Marie Chappe et al.

APPLIED SURFACE SCIENCE (2007)

Article Engineering, Electrical & Electronic

Characterizations of high resistivity TiNxOy thin films for applications in thin film resistors

Nguyen Duy Cuong et al.

MICROELECTRONICS RELIABILITY (2007)

Article Physics, Applied

Ultraviolet-visible absorption spectra of N-doped TiO2 film deposited on sapphire

Jaewon Park et al.

JOURNAL OF APPLIED PHYSICS (2006)

Article Materials Science, Coatings & Films

Effect of nitrogen on the photocatalytic activity of TiOxNy thin films

K. Prabakar et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2006)

Article Materials Science, Multidisciplinary

TiO-based coatings prepared by plasma spraying in air of Ti+C mixtures

B. Haller et al.

JOURNAL OF MATERIALS RESEARCH (2006)

Article Materials Science, Multidisciplinary

Reactively sputtered N-doped titanium oxide films as visible-light photocatalyst

MS Wong et al.

THIN SOLID FILMS (2006)

Article Physics, Applied

A transparent metal:: Nb-doped anatase TiO2 -: art. no. 252101

Y Furubayashi et al.

APPLIED PHYSICS LETTERS (2005)

Article Engineering, Electrical & Electronic

Transparent conducting oxide semiconductors for transparent electrodes

T Minami

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2005)

Article Materials Science, Multidisciplinary

Structural, optical and mechanical properties of coloured TiNxOy thin films

F Vaz et al.

THIN SOLID FILMS (2004)

Article Materials Science, Multidisciplinary

Nitrogen-doped titanium oxide films as visible light photocatalyst by vapor deposition

MC Yang et al.

THIN SOLID FILMS (2004)

Article Materials Science, Multidisciplinary

Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films

SH Mohamed et al.

THIN SOLID FILMS (2004)

Article Crystallography

A study of growth and morphological features of TiOxNy thin films prepared by MOCVD

SK Pradhan et al.

JOURNAL OF CRYSTAL GROWTH (2003)

Article Chemistry, Physical

Conduction and valence band positions of Ta2O5, TaON, and Ta3N5 by UPS and electrochemical methods

WJ Chun et al.

JOURNAL OF PHYSICAL CHEMISTRY B (2003)

Article Materials Science, Multidisciplinary

XRD and AES characterization of TiOX,Ny thin films grown by ion assisted deposition

IN Martev

VACUUM (2002)

Article Materials Science, Multidisciplinary

Nitrogen effects on crystallization kinetics of amorphous TiOxNy thin films

K Hukari et al.

JOURNAL OF MATERIALS RESEARCH (2002)

Article Multidisciplinary Sciences

Visible-light photocatalysis in nitrogen-doped titanium oxides

R Asahi et al.

SCIENCE (2001)

Article Materials Science, Multidisciplinary

High rate and process control of reactive sputtering by gas pulsing:: the Ti-O system

N Martin et al.

THIN SOLID FILMS (2000)

Article Materials Science, Multidisciplinary

Formation of thin TiNxOy films by using a hollow cathode reactive DC sputtering system

MH Kazemeini et al.

THIN SOLID FILMS (2000)

Article Materials Science, Multidisciplinary

Oxygen-ion-assisted deposition of TiO films

IN Martev

VACUUM (2000)