相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Utilizing mechanical adhesion force as a high contact force in a MEMS relay
Su-Bon Kim et al.
SENSORS AND ACTUATORS A-PHYSICAL (2021)
4 W Power MEMS Relay With Extremely Low Contact Resistance: Theoretical Analysis, Design and Demonstration
Su-Bon Kim et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
Review of Electrothermal Actuators and Applications
Alissa Potekhina et al.
ACTUATORS (2019)
Nanogap-Engineerable Electromechanical System for Ultralow Power Memory
Jian Zhang et al.
ADVANCED SCIENCE (2018)
A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications
Parviz Zolfaghari et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2018)
Nanomechanical Encoding Method Using Enhanced Thermal Concentration on a Metallic Nanobridge
Jeong Oen Lee et al.
ACS NANO (2017)
High Power Latching RF MEMS Switches
Maher Bakri-Kassem et al.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES (2015)
High-K materials and metal gates for CMOS applications
John Robertson et al.
MATERIALS SCIENCE & ENGINEERING R-REPORTS (2015)
A Comprehensive Analytical Model and Experimental Validation of Z-shaped Electrothermal Microactuators
Zhuo Zhang et al.
RECENT ADVANCES IN MECHANISM DESIGN FOR ROBOTICS (2015)
Electro-Thermo-Mechanical Modeling of V-beam Actuators
Radu-Stefan Chiorean
8TH INTERNATIONAL CONFERENCE INTERDISCIPLINARITY IN ENGINEERING, INTER-ENG 2014 (2015)
A sub-1-volt nanoelectromechanical switching device
Jeong Oen Lee et al.
NATURE NANOTECHNOLOGY (2013)
Bidirectional Electrothermal Actuator With Z-Shaped Beams
Yong Zhu et al.
IEEE SENSORS JOURNAL (2012)
Nanoelectromechanical contact switches
Owen Y. Loh et al.
NATURE NANOTECHNOLOGY (2012)
Seesaw Relay Logic and Memory Circuits
Jaeseok Jeon et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)
An electrothermal microactuator with Z-shaped beams
Changhong Guan et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Electromechanical Computing at 500°C with Silicon Carbide
Te-Hao Lee et al.
SCIENCE (2010)
Ultralow Voltage Crossbar Nonvolatile Memory Based on Energy-Reversible NEM Switches
Kerem Akarvardar et al.
IEEE ELECTRON DEVICE LETTERS (2009)
The Relationship Between Contact Resistance and Contact Force on Au-Coated Carbon Nanotube Surfaces Under Low Force Conditions
Esa M. Yunus et al.
IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES (2009)
Hybrid NEMS-CMOS integrated circuits: a novel strategy for energy-efficient designs
H. F. Dadgour et al.
IET COMPUTERS AND DIGITAL TECHNIQUES (2009)
CMOS considerations in nanoelectromechanical carbon nanotube-based switches
M. Y. A. Yousif et al.
NANOTECHNOLOGY (2008)
A thermal actuator for nanoscale in situ microscopy testing: design and characterization
Y Zhu et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2006)
Experimental study on superior mobility in (110)-oriented UTB SOI pMOSFETs
G Tsutsui et al.
IEEE ELECTRON DEVICE LETTERS (2005)
The role of van der Waals forces in adhesion of micromachined surfaces
FW Delrio et al.
NATURE MATERIALS (2005)
A thermal bimorph micromirror with large bi-directional and vertical actuation
A Jain et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Design and modeling of a MEMS bidirectional vertical thermal actuator
D Yan et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2004)
Leakage current mechanisms and leakage reduction techniques in deep-submicrometer CMOS circuits
K Roy et al.
PROCEEDINGS OF THE IEEE (2003)
分享论文
