4.5 Article

Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging

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Summary: This paper introduces a dual-frequency piezoelectric micromachined ultrasonic transducer (PMUT) line array with low crosstalk level, fabricated with PZT and Si diaphragm structure, showing high transmitting sensitivity and effective electromechanical coupling factor. Vibration coupling is effectively reduced by rectangular grooves and mis-aligned arrangement, and coupling effect between different frequencies can be ignored.

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