4.6 Article

Fabrication of n-Si/n-Ga2O3 heterojunctions by surface-activated bonding and their electrical properties

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Engineering, Electrical & Electronic

The Supercharged Semiconductor: Gallium oxide could make powerful radios and switch thousands of volts

Gregg H. Jessen

IEEE SPECTRUM (2021)

Article Nanoscience & Nanotechnology

Ga2O3-on-SiC Composite Wafer for Thermal Management of Ultrawide Bandgap Electronics

Yiwen Song et al.

Summary: The beta-phase gallium oxide (Ga2O3) is a promising ultrawide bandgap (UWBG) semiconductor with potential for significant performance improvements over current commercial power electronics materials such as GaN and SiC. However, overheating remains a major challenge for Ga2O3 device technologies. A novel Ga2O3/4H-SiC composite wafer with high heat transfer performance and an epi-ready surface finish has been developed in this study, enabling successful growth of a Ga2O3 epitaxial layer while maintaining composite wafer integrity. The study also found that phonon transport across the Ga2O3/4H-SiC interface is influenced by the thickness of the SiNx bonding layer and unintentional SiOx interlayer, and extrinsic effects impact the thermal conductivity of the Ga2O3 layer.

ACS APPLIED MATERIALS & INTERFACES (2021)

Article Chemistry, Physical

Impact of annealing temperature on band-alignment of PLD grown Ga2O3/Si (100) heterointerface

Manoj K. Yadav et al.

JOURNAL OF ALLOYS AND COMPOUNDS (2020)

Article Physics, Applied

Low-temperature direct bonding of β-Ga2O3 and diamond substrates under atmospheric conditions

Takashi Matsumae et al.

APPLIED PHYSICS LETTERS (2020)

Article Nanoscience & Nanotechnology

Thermal Transport across Ion-Cut Monocrystalline β-Ga2O3 Thin Films and Bonded β-Ga2O3 SiC Interfaces

Zhe Cheng et al.

ACS APPLIED MATERIALS & INTERFACES (2020)

Article Nanoscience & Nanotechnology

Deep acceptors and their diffusion in Ga2O3

Hartwin Peelaers et al.

APL MATERIALS (2019)

Article Nanoscience & Nanotechnology

High Thermal Boundary Conductance across Bonded Heterogeneous GaN-SiC Interfaces

Fengwen Mu et al.

ACS APPLIED MATERIALS & INTERFACES (2019)

Article Engineering, Manufacturing

Development of Large Diameter Semi-Insulating Gallium Oxide (Ga2O3) Substrates

J. D. Blevins et al.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2019)

Article Materials Science, Ceramics

Direct wafer bonding of Ga2O3-SiC at room temperature

Yang Xu et al.

CERAMICS INTERNATIONAL (2019)

Article Materials Science, Multidisciplinary

Static Dielectric Constant of β-Ga2O3 Perpendicular to the Principal Planes (100), (010), and (001)

A. Fiedler et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Editorial Material Physics, Applied

Guest Editorial: The dawn of gallium oxide microelectronics

Masataka Higashiwaki et al.

APPLIED PHYSICS LETTERS (2018)

Article Physics, Applied

Impact ionization in β-Ga2O3

Krishnendu Ghosh et al.

JOURNAL OF APPLIED PHYSICS (2018)

Article Physics, Applied

Three-dimensional anisotropic thermal conductivity tensor of single crystalline beta-Ga2O3

Puqing Jiang et al.

APPLIED PHYSICS LETTERS (2018)

Article Physics, Applied

Ab initio velocity-field curves in monoclinic β-Ga2O3

Krishnendu Ghosh et al.

JOURNAL OF APPLIED PHYSICS (2017)

Article Physics, Applied

Band alignment of Ga2O3/Si heterojunction interface measured by X-ray photoelectron spectroscopy

Zhengwei Chen et al.

APPLIED PHYSICS LETTERS (2016)

Article Physics, Applied

Effects of annealing on the electrical characteristics of GaAs/GaAs junctions by surface-activated bonding

Li Chai et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2016)

Review Physics, Applied

High-quality β-Ga2O3 single crystals grown by edge-defined film-fed growth

Akito Kuramata et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2016)

Article Physics, Applied

Anisotropic thermal conductivity in single crystal β-gallium oxide

Zhi Guo et al.

APPLIED PHYSICS LETTERS (2015)

Article Physics, Applied

Effects of annealing on electrical properties of Si/Si junctions by surface-activated bonding

Masashi Morimoto et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2015)

Article Physics, Applied

Electrical properties of Si/Si interfaces by using surface-activated bonding

J. Liang et al.

JOURNAL OF APPLIED PHYSICS (2013)

Proceedings Paper Physics, Applied

Band structures of Si/InGaP heterojunctions by using surface-activated bonding

Jianbo Liang et al.

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 10, NO 11 (2013)

Article Materials Science, Multidisciplinary

Role of self-trapping in luminescence and p-type conductivity of wide-band-gap oxides

J. B. Varley et al.

PHYSICAL REVIEW B (2012)