期刊
JOURNAL OF ALLOYS AND COMPOUNDS
卷 890, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2021.161931
关键词
beta-Ga2O3; Schottky barrier diode; Solar-blind photodetector; Transparent conductive oxide
资金
- Korea Institute for Advancement of Technology (KIAT) - Ministry of Trade, Industry & Energy (MOTIE, Korea) [P0012451]
- Technology Innovation Program - MOTIE, Korea [20016102]
- Korea Evaluation Institute of Industrial Technology (KEIT) [20016102] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The study demonstrates an all oxide-based beta-Ga2O3 photodiode with excellent photoelectric performance for deep ultraviolet detection. The use of transparent conductive InZnSnO and InSnO as contacts allows for clear rectifying characteristics, while post-annealing treatment can modify the Schottky interface properties and influence the photoresponse.
Ultra-wide bandgap beta-Ga2O3 photodiodes have received great attention due to transparent solar-blind deep ultraviolet photodetectors. We demonstrated an all oxide-based single-crystal beta-Ga2O3 photodiode in-corporated with transparent conductive InZnSnO and InSnO as Schottky and Ohmic contacts, respectively. High work function and low resistivity of InZnSnO allow for clear rectifying characteristics with a low dark current (< 0.1 nA) of up to -100 V of reverse bias. The Schottky barrier height and junction defects at the Schottky interface were modified using post-annealing treatment, thereby influencing the deep ultraviolet photoresponse. The responsivity of the annealed device was 9.6 mA/W, decreasing the Schottky barrier height engineering, while the photo responding speed was degraded and caused a persistent photocurrent effect due to the generation of defect states. (C) 2021 Elsevier B.V. All rights reserved.
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