Analysis of step-velocity-dependent concentration of magnesium in GaN based on Burton-Cabrera-Frank theory and step-edge segregation model

Based on Burton-Cabrera-Frank theory and the step-edge segregation model, we analyzed the reported difference in the sheet concentration of doped magnesium under naturally formed surface stripes on homo-epitaxially grown layers on a freestanding GaN substrate misoriented from a c-plane by 0.3 degrees. By assuming the step height being equal to the peak-to-valley height of the surface stripes, we considered the growth steps on gently and sharply sloped surfaces to be supplied, respectively, from mixed dislocations and the misorientation from the c-plane. The step-velocity dependence of the magnesium concentration was reproduced with the reported magnesium diffusivity of 3 x 10(-14) cm(2) s(-1).

Automated summary

Based on the Burton-Cabrera-Frank theory and step-edge segregation model, the study analyzed the difference in doped magnesium concentration under naturally formed surface stripes. It considered the growth steps on different sloped surfaces and confirmed the relationship between magnesium concentration and step velocity.