期刊
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
卷 71, 期 -, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2022.3151173
关键词
Probes; Electric potential; Electrets; Force; Electrostatics; Imaging; Electrodes; Electret; energy harvester; Kelvin probe force microscope (KFM); microelectromechanical systems
资金
- JST CREST [JPMJCR15Q4]
An imaging method using Kelvin probe force microscope was developed to evaluate the surface potential distribution of highly charged micro-sized samples, which is crucial for the assessment of electret films in electrostatic induction-type energy harvesters.
An imaging method for a highly charged material using a Kelvin probe force microscope (KFM) was developed. Energy harvesters generate electric energy from the surrounding energy sources for a stand-alone power supply for Internet-of-Things devices. An electret film is a key component in an electrostatic induction-type energy harvester. However, the evaluation method of the electret film remains a problem for microscale measurements. KFM can provide a microscopic surface potential image corresponding to charge distribution. KFM is generally used to measure low potential distributions below a few volts because the electrostatic force between the cantilever that holds the tip and the sample is negligible. A 50--long tip probe was fabricated, which has a longer tip than any commercially available probes. The surface potential difference of 50 V with a step distribution was measured using the developed KFM with a long tip probe. A potassium ion electret film formed on the sidewall of a comb electrode in an energy harvester fabricated by microelectromechanical systems & x2019; technology was measured using the developed KFM. The measured charging potential distribution was from & x2212;30.1 to & x2212;28.9 V in a measured area, which was close to the mean charging potential measured using a conventional method of & x2212;29.2 V. The developed KFM can contribute to the evaluation of highly charged micro-sized samples.
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