期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 68, 期 12, 页码 6154-6158出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3117492
关键词
Amorphous indium gallium zinc oxide thin-film transistors (a-IGZO TFTs); high-kappa; subthreshold swing (SS); trap density
资金
- National Natural Science Foundation of China [62074075]
- National Key Research and Development Program of China [2019YFB2205400]
A high-performance transparent amorphous indium gallium zinc oxide thin-film transistor (a-IGZO TFT) gated by ALD-deposited HfAlOx was reported in this study. After an optimization process, the device showed significantly reduced trap density and good stability.
We report a high-performance transparent amorphous indium gallium zinc oxide thin-film transistor (a-IGZO TFT) gated by atomic layer deposition (ALD)-deposited HfAlOx. Through a postfabrication annealing optimization process, the total trap density of the device can be reduced in two orders of magnitudes. The subthreshold swing (SS) reaches an ultralow level of 62.29 mV/dec due to the low defect states. A large l(ON)/I(OFF )and a high mobility of 2.76 x 10(9) and 18.94 cm(2)/V.s can be achieved, respectively. In addition, the devices exhibit good stability in terms of positive bias stress, thermal, and aging tests. The defect optimization process has been verified by the X-ray photoelectron spectroscopy analysis. Finally, a resistor-loaded inverter was constructed, which showed ideal swing characteristics and its voltage gain was as high as 39 at 7 V. These results indicate such a-IGZO TFT is of great potential for the emerging electronics, large-area display, and other low-power electronics.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据