4.6 Article

Modeling Process and Device Behavior of Josephson Junctions in Superconductor Electronics With TCAD

期刊

IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 68, 期 11, 页码 5448-5454

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3085540

关键词

Object oriented modeling; Mathematical model; Oxidation; Computational modeling; Tools; Semiconductor device modeling; Metals; Device technology computer-aided design (TCAD); Josephson junction (JJ); process TCAD; superconductor electronics (SCE)

资金

  1. Intelligence Advanced Research Projects Activity (IARPA) Supertools Project [W911NF-17-1-0120]

向作者/读者索取更多资源

The development of a process/device simulation platform for modeling superconductor electronics integrates process and device simulation tools to simulate Josephson junction fabrication processes and predict operational figures of merit. This aims to provide an environment for simulating JJ circuits.
We report the development of a process/device simulation platform to model superconductor electronics. The process simulator leverages the back-end modeling capabilities of Florida object-oriented process/device/reliability simulator (FLOOXS) and builds on the existing models to simulate processes specific to Josephson junction (JJ) fabrication. The device simulator uses the process generated models and computes the normal-state electrical properties of a Nb/Al-AlO/Nb JJ. It is used to predict key operational figures of merit and how they vary with changes in process models. By integrating the process and device simulation tools, this research aims to offer an environment for the simulation of JJ circuits.

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