期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 68, 期 11, 页码 5448-5454出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3085540
关键词
Object oriented modeling; Mathematical model; Oxidation; Computational modeling; Tools; Semiconductor device modeling; Metals; Device technology computer-aided design (TCAD); Josephson junction (JJ); process TCAD; superconductor electronics (SCE)
资金
- Intelligence Advanced Research Projects Activity (IARPA) Supertools Project [W911NF-17-1-0120]
The development of a process/device simulation platform for modeling superconductor electronics integrates process and device simulation tools to simulate Josephson junction fabrication processes and predict operational figures of merit. This aims to provide an environment for simulating JJ circuits.
We report the development of a process/device simulation platform to model superconductor electronics. The process simulator leverages the back-end modeling capabilities of Florida object-oriented process/device/reliability simulator (FLOOXS) and builds on the existing models to simulate processes specific to Josephson junction (JJ) fabrication. The device simulator uses the process generated models and computes the normal-state electrical properties of a Nb/Al-AlO/Nb JJ. It is used to predict key operational figures of merit and how they vary with changes in process models. By integrating the process and device simulation tools, this research aims to offer an environment for the simulation of JJ circuits.
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