4.6 Article

Study of a Palladium Nanoparticle/Indium Oxide-Based Hydrogen Gas Sensor

期刊

IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 69, 期 1, 页码 318-324

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3131117

关键词

Hydrogen gas sensor; indium oxide (In2O3); nanoparticle (NP); palladium (Pd); radio frequency (RF) sputtering; selectivity

资金

  1. Ministry of Science and Technology (MOST) [MOST 109-2221-E-006-083-MY2]

向作者/读者索取更多资源

An interesting hydrogen gas sensor utilizing palladium nanoparticles to enhance surface area/volume ratio and catalytic reactivity was studied. The sensor showed high sensing response and low detecting content for hydrogen gas at optimal operating temperature, with excellent selectivity and advantages of simple structure, low cost, and easy fabrication process.
An interesting hydrogen (H-2) gas sensor, synthesized by an indium oxide (In2O3) layer and evaporated palladium (Pd) nanoparticles (NPs), is manufactured and studied. The utilized Pd NPs essentially enhance the surface area/volume (S-A/V) ratio and catalytic reactivity of the Pd metal. Energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM), high-resolution scanning electron microscopy (HRSEM), and TEM were used to investigate the relevant material behaviors of the proposed Pd NP/In2O3 sensor device. The sensing mechanism is explicated in this study. A very high-sensing response of 5243 under 1% H-2/air gas with a response time of 12 s and an extremely low-detecting content of 100 ppb H-2/air were obtained at the optimal operating temperature of 225 degrees C. In addition, excellent selectivity toward hydrogen gas is observed for the studied device. The proposed sensor also shows advantages of simple structure, low-cost, and relatively easy fabrication process.

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