期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 69, 期 5, 页码 2521-2527出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2022.3142237
关键词
MOSFET; Silicon carbide; Logic gates; Degradation; Aging; Stress; Voltage measurement; Degradation; reliability; repetitive short circuit (RSC); SiC planar-gate MOSFET; SiC trench-gate MOSFET
资金
- China Postdoctoral Science Foundation [2018M641134]
- Beijing Postdoctoral Research Foundation [ZZ2019-64]
- Beijing Chaoyang District Postdoctoral Research Foundation [2019ZZ-36]
This article investigates the degradation of SiC MOSFETs under short circuit stress and develops an aging platform for experimental analysis. The study finds bidirectional VTH shift in different types of SiC MOSFETs with varying degradation rates. Device simulation reveals that the damaged region in SiC planar-gate MOSFET is near the channel area, while in SiC trench-gate MOSFET, it is at the trench corner.
The reliability of SiC MOSFETs under harsh operating conditions, such as short circuit (SC) stress, remains a major concern. In this article, a dedicated aging platform is developed to study the degradation of SiC planar- and trench-gate MOSFETs under repetitive SC conditions. The static characteristics of the devices are monitored in real-time during the test. Depending on the gate bias used in the experiments, a bidirectional $V_{TH}$ shift in both types of devices is observed, yet with a different degradation rate. The underlying degradation mechanisms investigated by device simulation reveal that the damaged region in the SiC planar-gate MOSFET is located near the channel area, while at the trench corner in the SiC trench-gate MOSFET. These research outcomes enable better understanding of the degradation mechanisms of different SiC MOSFET structures and possible ruggedness improvements in the future.
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