期刊
IEEE SENSORS JOURNAL
卷 22, 期 4, 页码 3164-3171出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2022.3141409
关键词
Photonics; Avalanche photodiodes; Sensors; Current measurement; Schottky barriers; Electrodes; Absorption; Metal-insulator-semiconductor; photodetector; photodiode; Schottky barrier; tunneling diode
资金
- Ministry of Science and Technology, Taiwan [MOST 110-2221-E-002-140, MOST 110-2622-8-002-014]
By utilizing the Schottky barrier height modulation mechanism, metal-insulator-semiconductor tunnel diodes (MISTD) achieve high photon current gain, with the operation voltage being able to go down and assist in high-speed applications.
Schottky barrier height modulation (SBHM) mechanism is utilized on metal-insulator-semiconductor tunnel diodes (MISTD) to achieve high photon current gain. The photon current gain can reach over 24000 at 2.5 V for the MISTD with oxide thickness 3.11 nm under photon flux of 1.03 x 10(12) cm(-2)sec-(1) . The operation voltage can go down to below 1 V depending on the oxide thickness of MISTD and the requirement of the gain. For example, the MISTD with oxide thickness 2.89 nm can produce photon current gain above 2800 at 1 V under photon flux of 1.03 x 10(12) cm(-2)sec-(1). It is found that the devices can reach an electric field in the order of 10(4)-10(5) V/cm under low operation voltage, which is helpful for high-speed applications. MISTD with gate metal and oxide thickness being properly chosen is simple in structure but effective in photon sensing.
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