期刊
IEEE SENSORS JOURNAL
卷 21, 期 19, 页码 21349-21358出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2021.3103265
关键词
Bistable curved beam; snap-through; latching; electrostatic actuation; bidirectional switching; single electrode operation; axial stress
资金
- Israel Ministry of Science, Technology and Space (MOST)
- Israel Science Foundation (ISF) [1272/16, 3-12369]
- Blavatnik Postdoctoral Research Fellowship
- Henry and Dinah Krongold Chair of Microelectronics
This study discusses the use of Joule heating to apply prestress to curved micromechanical beams in order to eliminate symmetry breaking and ensure bidirectional dynamic switching. Experimental results show that prestress plays a key role in the dynamic response of the beam, allowing for a more compact device. The research provides guidance for the design of devices in this field.
Electrostatically actuated, bistable, curved micromechanical beams can exhibit latching, wherein the beams remain in two distinct stable states without an applied voltage. These structures could serve as building blocks in a variety of applications such as micromechanical logic elements, switches, non-volatile memories, and low power consumption sensors. However, the design of such devices is challenging since such structures are prone to symmetry breaking, which consequently inhibits latching. Generally, asymmetric responses may be circumvented by introducing a tailored axial compressive prestress. In this work we explore, both theoretically and experimentally, the influence of prestress on the single electrode, bidirectional dynamic switching of curved, latchable, single crystal Si approximate to 1000 mu m long and approximate to 3.5 mu m wide beams. We use Joule heating to apply the necessary prestress required to eliminate symmetry breaking and ensure latching. In accordance with reduced-order model predictions, our experimental findings show that prestress plays a key role in the dynamic response of the beam. Our results demonstrate bidirectional operation using a single electrode, fostering a compact footprint device for tailoring the axial stress and dynamic conditions.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据