4.6 Article

Micron-Scale Resolution Image Sensor Based on Flexible Organic Thin Film Transistor Arrays via Femtosecond Laser Processing

期刊

IEEE ELECTRON DEVICE LETTERS
卷 43, 期 2, 页码 248-251

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3133264

关键词

Organic thin film transistors; Laser ablation; Optimized production technology; Bending; Sensor arrays; Thermal stability; Substrates; Femtosecond laser; organic thin-film transistors (OTFTs); ablation; image sensor

资金

  1. National Natural Science Foundation of China [11604051, 61974029]
  2. Natural Science Foundation of Fujian Province [2020J05104, 2020J06012]
  3. Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China [2021ZZ129]

向作者/读者索取更多资源

Arrays of high-resolution and flexible organic thin-film transistors (OTFTs) were fabricated using femtosecond laser, enabling the development of flexible wearable electronic devices.
Arrays of flexible organic thin-film transistors (OTFTs) are the prerequisite to realize commercialization of flexible electronics. However, photolithography and print techniques are uneasy to combine high performance, high integration density, and compatibility with flexible substrates to fabricate OTFT arrays. In this work, OTFT arrays with high resolution, flexibility and process convenience are patterned by femtosecond laser (fs-laser). 1 cm(2) of area can accommodate up to 6250 transistors with sharp edges and short channel lengths by selective processing. Furthermore, micron-scale resolution flexible image sensor with integration potential were verified. Hence, these results will impel the development of flexible wearable electronic devices in the future.

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