期刊
IEEE ELECTRON DEVICE LETTERS
卷 43, 期 3, 页码 458-461出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3148232
关键词
Photoconductivity; Microsensors; Light emitting diodes; Ethanol; Containers; Current measurement; Time factors; GaN; full-angle detection; optoelectronic integration; microsensor
资金
- National Natural Science Foundation of China [62004088, 12074170]
- Shenzhen Natural Science Foundation Stability Support Program Project [20200925160044004]
- NSQKJJ [K21799120]
The fabrication of a miniature III-nitride angle sensor is demonstrated in this study. By integrating the device with a liquid pendulum, the on-chip detectors can effectively measure the angle rotation with high precision, making it suitable for a wide range of practical applications.
The fabrication of a miniature III-nitride angle sensor is demonstrated. A monolithic device composed of a light emitter and four detectors is fabricated on a GaN-on-sapphire wafer. By integrating the device with a glass cylindrical container partially filled with ethanol as a liquid pendulum, the on-chip detectors can effectively sense the change of internally reflected light with angle rotation, and produce the photocurrent signals to indicate the angle level. Verified by a series of experimental measurements, the millimeter-sized sensor exhibits full-angle detection capability, sub-second response time, and high repeatability, which makes it well suited for broad practical applications in angle sensing.
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