期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 63, 期 11, 页码 4535-4541出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2016.2610466
关键词
Al; annealing; flexible; sensor; surface acoustic wave (SAW); ZnO
资金
- Northumbria University, Newcastle upon Tyne
- Royal Academy of Engineering-Research Exchange with China and India
- NSFC [61274086]
- Natural Science Foundation of Guangdong Province [S2013040015481]
- Foundation for Distinguished Young Talents in Higher Education of Guangdong [2013LYM_0078]
- Basic Research Program of Shenzhen [JCYJ20140418091413493]
This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 mu m thick were deposited onto aluminum foils (50 mu m thick) using magnetron sputtering and then annealed in air at different temperatures between 300 degrees C and 500 degrees C. Effects of postannealing on structural, optical, and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350 degrees C was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precise temperature sensing.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据