期刊
DIAMOND AND RELATED MATERIALS
卷 120, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2021.108665
关键词
Diamond; Surface activated bonding; Heterojunction diodes; Electrical properties
类别
资金
- JSPS KAKENHI [20K04581]
- Grants-in-Aid for Scientific Research [20K04581] Funding Source: KAKEN
p+-Si/p-diamond heterojunction diodes fabricated using surface-activated bonding showed improved electrical properties after post-bonding annealing at temperatures up to 873 K, with better thermal stability compared to Cu/diamond Schottky diodes. The estimated barrier height at Si/diamond bonding interfaces after annealing at 873 K is close to the assumed value when no offset is formed at the vacuum level across the interfaces.
We fabricate p+-Si/p-diamond heterojunction diodes by using surface-activated bonding and examine the electrical properties of Si/diamond interfaces by measuring current-voltage and current-voltage-temperature characteristics. We find that the electrical properties of heterojunction diodes are improved by post-bonding annealing at temperatures up to 873 K in terms of the ideality factor and reverse-bias current. Additionally, fabricated diodes also reveal thermal stability better than that of Cu/diamond Schottky diodes in terms of the rectification factor. The barrier height at Si/diamond bonding interfaces annealed at 873 K is estimated to be 0.55 and 0.66 eV by analyzing the relationship between the saturation current density and temperature and the reverse-bias characteristics at room temperature, respectively. These values are close to that obtained by assuming that no offset is formed in the vacuum level across the Si/diamond bonding interfaces (0.36 eV).
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