Lithium phosphorus oxynitride thin films for rechargeable lithium batteries: Applications from thin-film batteries as micro batteries to surface modification for large-scale batteries

This article reviews the technological trends in lithium-phosphorous-oxynitride (LiPON)-film-based thin-film batteries. LiPON films have been actively used in thin-film batteries containing lithium anodes because of their excellent contact stability with lithium and the advantages offered for thin-film formation. In addition, studies that have focused on the use of LiPON films as protective layers to prevent surface deterioration of electrode materials are explored. Various studies have been conducted using LiPON films to improve the per-formance degradation of rechargeable lithium batteries due to a side reaction between the electrode material and the electrolyte. Finally, the technical tasks required for enhancing the utilization of LiPON films in the field of thin-film batteries or electrode surface modification are summarized.

Automated summary

This article reviews the technological trends and applications of lithium-phosphorous-oxynitride (LiPON) films in thin-film batteries. LiPON films are actively used in lithium anode thin-film batteries due to their excellent contact stability with lithium and advantages in thin-film formation. Furthermore, LiPON films are explored as protective layers to prevent surface deterioration of electrode materials. Multiple studies have been conducted to improve the performance degradation of rechargeable lithium batteries by utilizing LiPON films. Finally, the technical tasks required for enhancing the utilization of LiPON films in the field of thin-film batteries or electrode surface modification are summarized.