期刊
APPLIED SURFACE SCIENCE
卷 573, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2021.151481
关键词
2D materials; Metal oxide nanosheets; Ru oxide; Mn oxide; Humidity sensor
类别
资金
- National Research Foundation of Korea (NRF) - Korea government (MSIT) [2020R1C1C1010336]
- Hydrogen Energy Innovation Technology Development Program of the National Research Foundation of Korea (NRF) - Korean government (MSIT) [2019M3E6A1103959]
- Nano-Convergence Foundation - Ministry of Science and ICT(MSIT, Korea)
- Ministry of Trade, Industry and Energy(MOTIE, Korea) [20000230]
- National Research Foundation of Korea [2019M3E6A1103959, 2020R1C1C1010336] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
In this study, atomically thin 2D metal oxide nanosheets were synthesized and their humidity sensing properties were investigated, showing opposite humidity sensing responses between semiconducting and metallic oxide NSs. The semiconducting manganese oxide NSs exhibited decreasing resistance transitions at low humidity levels due to proton conduction, while the metallic ruthenium oxide NSs showed increasing resistance transitions at high humidity levels as a result of proton trapping by accepting electrons, with faster response and recovery times.
Collecting real-time breath humidity data is important for calibrating gas sensors from interfering signals in breath components, ultimately for accurately monitoring a patient's physiological information for applications in non-invasive and point-of-care diagnostics. In this work, atomically thin 2D metal oxide nanosheets (NSs) were synthesized by a liquid phase exfoliation process and their humidity sensing properties were investigated. Interestingly, Opposite humidity sensing responses (R-D/R-H) were observed between semiconducting oxide and metallic oxide NSs. For the semiconducting manganese (Mn) oxide NSs, decreasing resistance transitions were obtained with the response of 24.01 at 44.5% RH at low humidity levels (i.e., 6.1-45% RH), which was governed by proton (H+) conduction. On the other hand, the metallic ruthenium (Ru) oxide NSs exhibited increasing resistance transitions with the response of 0.28 at 96.3% RH at a high humidity range (i.e., 50-99.9% RH) as a result of proton trapping by accepting electrons upon the exposure to excess water molecules. Ru oxide NSs exhibited the response and recovery times of 68 sec and 8 sec, respectively, at 96.3% RH. Real-time breath humidity monitoring is demonstrated by integrating Ru oxide NSs with a wristband-type wireless sensing module, which can transmit the sensing data to a mobile device.
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