期刊
APPLIED PHYSICS LETTERS
卷 119, 期 13, 页码 -出版社
AIP Publishing
DOI: 10.1063/5.0060061
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资金
- Korean National Research Council of Science Technology [CAP-15-04-KITECH]
- Korea Evaluation Institute of Industrial Technology - Ministry of Trade, Industry and Energy [20000423]
- National Research Foundation of Korea (NRF) - Korea government (MSIT) [2020R1A5A1019649]
- Korea Evaluation Institute of Industrial Technology (KEIT) [20000423] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The use of a resonant absorber allows for low-temperature sintering of InZnO sol-gel films with low-energy-density intense pulse light, resulting in good electrical properties in devices. Further analysis shows that the pulse light irradiation facilitated sol-gel reactions in the films.
A resonant absorber enables low-temperature sintering of InZnO sol-gel films with low-energy-density intense pulse light (IPL) irradiation (1J/pulse). A back-gate structure, incorporated with a resonant absorber, exhibits effective light absorption. A device fabricated based on such a gate structure and sintered with irradiation of 50 pulses (similar to 50J/cm(2)) demonstrates good electrical properties with a mobility of 0.34cm(2)/Vs and an on-off ratio of 10(6) and a substrate temperature under 210 degrees C, showcasing that employing a resonant absorber could enable low-temperature sintering of sol-gel films with low-energy-density irradiation. Further x-ray photoelectron spectroscopy analysis of the oxygen and nitrogen peaks indicates that IPL irradiation facilitated sol-gel reactions in films. Published under an exclusive license by AIP Publishing.
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