4.5 Article

Top-gate transistors fabricated on epitaxially grown molybdenum disulfide and graphene hetero-structures

期刊

APPLIED PHYSICS EXPRESS
卷 14, 期 12, 页码 -

出版社

IOP Publishing Ltd
DOI: 10.35848/1882-0786/ac3546

关键词

Top-gate Transistors; 2D Material Hetero-structures; Passivation

资金

  1. Ministry of Science and Technology, Taiwan [MOST 108-2221-E-001-017-MY3, MOST 110-2622-8-002-014]
  2. Academia Sinica, Taiwan [AS-iMATE-109-41]

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The growth of MoS2 layer on graphene surfaces can enhance the field-effect mobility of transistors, acting as an efficient passivation layer for the graphene channel. This enhancement is observed even with only a mono-layer MoS2 passivation layer.
We have demonstrated that by using the thermal evaporator, wafer-scale and uniform bi-layer MoS2 can be grown on graphene surfaces without introducing significant damage to the graphene channel. Compared with the top-gate transistors fabricated on standalone graphene films, the field-effect mobility value enhancement from 9.3 to 35.0 cm(2) V-1 center dot s(-1) is observed for the device fabricated on the MoS2/graphene hetero-structures, which suggests that the MoS2 layer can act as an efficient passivation layer to the graphene channel. Similar field-effect mobility values obtained for the device with only a mono-layer MoS2 passivation layer are also demonstrated.

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