4.8 Article

Morphology Control and Crystalline Quality of p-Type GaN Shells Grown on Coaxial GaInN/GaN Multiple Quantum Shell Nanowires

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 13, 期 45, 页码 54486-54496

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsami.1c13947

关键词

MQS nanowires; p-GaN shell; crystalline quality; growth mechanism; micro-LEDs; emission peak

资金

  1. MEXT Program for research and development of next-generation semiconductor to realize energy-saving society MEXT Private University Research Branding Project JSPS KAKENHI [15H02019]
  2. JSPS KAKENHI [17H01055]
  3. Japan Science and Technology CREST [16815710]
  4. JSPS KAKENHI for Innovative Areas [16H06416]

向作者/读者索取更多资源

The morphology and crystalline quality of p-GaN shells on coaxial GaInN/GaN multiple quantum shell nanowires (NWs) were investigated, with the TMG supply and growth temperature found to be crucial parameters. High-angle annular dark-field scanning transmission electron microscopy characterization revealed no clear extended defects in the core and sidewall of the NWs, but some dislocations were observed at the interface between the serpentine MQS and the p-GaN shell near the tips.
The morphology and crystalline quality of p-GaN shells on coaxial GaInN/GaN multiple quantum shell (MQS) nanowires (NWs) were investigated using metal-organic chemical vapor deposition. By varying the trimethylgallium (TMG) flow rate, Mg doping, and growth temperature, it was verified that the TMG supply and growth temperature were the dominant parameters in the control of the p-GaN shape on NWs Specifically, a sufficiently high TMG supply enabled the formation of a pyramid-shaped NW structure with a uniform p-GaN shell. The ratio of the growth rate between the c- and m-planes on the NWs was calculated to be approximately 0.4545. High-angle annular dark-field scanning transmission electron microscopy characterization confirmed that no clear extended defects were present in the n-GaN core and MQS/p-GaN shells on the sidewall. Regarding the p-GaN shell above the c-plane MQS region, only a few screw dislocations and Frank-type partial dislocations appeared at the interface between the serpentine c-plane MQS and the p-GaN shell near the tips. This suggested that the crystalline quality of the MQS structure can trigger the formation of screw dislocations and Frank-type partial dislocations during the p-GaN growth. The growth mechanism of the p-GaN shell on NWs was also discussed. To inspect the electronic properties, a prototype of a micro light-emitting diode (LED) with a chip size of 50 X 50 mu m(2) was demonstrated in the NWs with optimal growth. By correlating the light output curve with the electroluminescence spectra, three different emission peaks (450, 470, and 510 nm) were assignable to the emission from the m-, r-, and c-planes, respectively.

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