期刊
ACS APPLIED MATERIALS & INTERFACES
卷 13, 期 43, 页码 51383-51392出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.1c15875
关键词
rhombohedral ZrO2 films; ferroelectricity; wake-up free films; epitaxially strained films; ion-beam sputtering deposition technique
资金
- Portuguese Foundation for Science and Technology (FCT) [UIDB/04650/2020]
- DSTSERB, Government of India [ECR/2017/00006]
- national funds through the Portuguese Foundation for Science and Technology/MCTES [UIDB/50011/2020, UIDP/50011/2020]
- Romanian Ministry of Education and Research [PN-III-P4-ID-PCCF2016-0047, 16/2018]
- Luxembourg National Research Fund [PRIDE/15/10935404, INTER/ANR/16/11562984]
- CERIC-ERIC Consortium [20192055]
- Ministry of Science and Higher Education of the RF [2968, 075-15-2021-677]
- [NECL -NORTE-01-0145-FEDER-022096]
- [UID/NAN/50024/2019]
- Fundação para a Ciência e a Tecnologia [UID/NAN/50024/2019] Funding Source: FCT
Zirconia- and hafnia-based thin films have attracted significant attention due to their ferroelectric behavior at the nanoscale. This study reveals a new ferroelectric rhombohedral phase of ZrO2 in thin films grown on (111)-Nb:SrTiO3 substrates, exhibiting high ferroelectric polarization and low coercive field with characteristics in agreement with the nucleation limited switching (NLS) model for ferroelectric domain reversal.
Zirconia- and hafnia-based thin films have attracted tremendous attention in the past decade because of their unexpected ferroelectric behavior at the nanoscale, which enables the downscaling of ferroelectric devices. The present work reports an unprecedented ferroelectric rhombohedral phase of ZrO2 that can be achieved in thin films grown directly on (111)-Nb:SrTiO3 substrates by ion-beam sputtering. Structural and ferroelectric characterizations reveal (111)-oriented ZrO2 films under epitaxial compressive strain exhibiting switchable ferroelectric polarization of about 20.2 mu C/cm(2) with a coercive field of 1.5 MV/cm. Moreover, the time-dependent polarization reversal characteristics of Nb:SrTiO3/ZrO2/Au film capacitors exhibit typical bell-shaped curve features associated with the ferroelectric domain reversal and agree well with the nucleation limited switching (NLS) model. The polarization-electric field hysteresis loops point to an activation field comparable to the coercive field. Interestingly, the studied films show ferroelectric behavior per se, without the need to apply the wake-up cycle found in the orthorhombic phase of ZrO2. Overall, the rhombohedral ferroelectric ZrO2 films present technological advantages over the previously studied zirconia- and hafnia-based thin films and may be attractive for nanoscale ferroelectric devices.
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