期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 39, 期 4, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/6.0001059
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资金
- Air Force Office of Scientific Research [FA9550-18-1-0387]
- Leibniz Association
The barrier height inhomogeneity in beta-Ga2O3 Schottky diodes has a strong correlation with temperature, with the barrier height increasing at first and then decreasing as the temperature rises. This behavior is attributed to the bandgap narrowing of the semiconductor, resulting in close to homogeneous electrical characteristics in normal operating conditions.
From an analysis of Pd contact Schottky diodes fabricated on (100) beta-Ga2O3 wafers, in combination with data extracted from published work, we show that the barrier height inhomogeneity commonly observed in beta-Ga2O3 Schottky diodes has a strong correlation to the temperature. For doping of similar to 5 x 10(17) cm(-3), the barrier height arising from an inhomogeneous contact continues to increase to a temperature of similar to 440 K followed by a decrease upon a further increase in temperature, which is commonly attributed to the bandgap narrowing of the semiconductor referred to as the Varshni shift. At this regime, Schottky characteristics representing close to homogeneous behavior is obtained. Thus, a device under normal operating conditions in a system, which results in an elevated temperature, is expected to exhibit near-homogeneous electrical characteristics.
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