GISAXS: A versatile tool to assess structure and self-assembly kinetics in block copolymer thin films

Over the past two decades grazing incidence small-angle scattering (GISAXS) has morphed into a powerful tool for the determination of the structure and self-assembly kinetics of block copolymer thin films. An overview of the scattering process and the interpretation of GISAXS data is given and experimental requirements are discussed. The application of the technique for the characterization of block copolymer thin films is illustrated with selected examples.

Automated summary

Over the past two decades, grazing incidence small-angle scattering (GISAXS) has become a powerful tool for determining the structure and self-assembly kinetics of block copolymer thin films. This review provides an overview of the scattering process, interpretation of GISAXS data, and experimental requirements, and illustrates the application of GISAXS technique in characterizing block copolymer thin films with selected examples.