期刊
ACS APPLIED NANO MATERIALS
卷 4, 期 9, 页码 9283-9292出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsanm.1c01807
关键词
reduced graphene oxide; preserved patterning linewidth; tunable photoreduction; femtosecond laser; photoreduction-insensitive patterning
资金
- National Research Foundation of Korea (NRF) - Ministry of Education [2018R1A6A1A03025242]
- Ministry of Science and ICT [2020R1A2C3007007]
- National Research Foundation of Korea [2020R1A2C3007007] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
By utilizing multistep fs-laser writing with a low repetition rate, photoreduction-insensitive GO/rGO patterning is achieved, maintaining a minimum linewidth and optimizing device performance without compromising feature size.
As boosting the degree of photoreduction widens a patterning linewidth, devices comprising femtosecond laser (fs-laser)-induced reduced graphene oxide (rGO) present the dilemma of a choice between optimum performance and miniaturization. Here, by exploiting multistep fs-laser writing with a low repetition rate, photoreduction-insensitive GO/rGO patterning is realized, which exhibits a photoreduction-insensitive and constant patterning linewidth at arbitrary stages of the evolving photoreduction process. During a photo-reductioninsensitive patterning, a GO film is exposed iteratively to the same fs-laser beam to achieve targeted photoreduction levels, while the minimum patterning linewidth is preserved under a fixed pulse energy. The proposed patterning approach that results from preventing a thermal accumulation and roughening a GO/rGO surface achieves an optimizable device performance, without compromising on the feature size. In particular, a photoreduction-insensitive patterning provides a high optical transmission contrast while preserving a minimum linewidth. When two Fresnel zone plates that involve binary zones comprising GO/rGO are fabricated via single-exposure and multistep fs-laser-writing methods, respectively, the latter patterning approach provides a 3.9-fold enhancement of focusing efficiency compared with the former. Consequently, the demonstrated photoreduction-insensitive patterning approach confirms the feasibility of maintaining a patterning linewidth while tailoring the photoreduction levels of GO/rGO, thus promoting the development of GO/rGO-related micro/nanodevices.
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