期刊
FRONTIERS IN ENERGY RESEARCH
卷 9, 期 -, 页码 -出版社
FRONTIERS MEDIA SA
DOI: 10.3389/fenrg.2021.625123
关键词
thin-film batteries; cathode; Li ion batteries; physical vapor deposition; thermal evaporation
资金
- Faculty Development Competitive Research Grant Program (FDCRGP) of Nazarbayev University from the Ministry of Education and Science of the Republic of Kazakhstan [110119FD4504]
- Ministry of Education and Science of the Republic of Kazakhstan [AP08052231]
With the advancement of PVD technology, all solid-state thin-film batteries prepared through this technique offer higher energy density and more homogeneous active materials, making them more promising compared to traditional methods.
With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. Physical vapor deposition (PVD) by means of thermal evaporation, magnetron sputtering, ion-beam deposition, pulsed laser deposition, etc., is among the most promising techniques for such purposes. Layer-by-layer deposition of all solid-state thin-film batteries via PVD has led to many publications in the last two decades. In these batteries, active materials are homogeneous and usually binder free, which makes them more promising in terms of energy density than those prepared by the traditional powder slurry technique. This review provides a summary of the preparation of cathode materials by PVD for all solid-state thin-film batteries. Cathodes based on intercalation and conversion reaction, as well as properties of thin-film electrode-electrolyte interface, are discussed.
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