期刊
JOULE
卷 5, 期 9, 页码 2466-2478出版社
CELL PRESS
DOI: 10.1016/j.joule.2021.07.003
关键词
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资金
- Office of Naval Research [N00014-19-1-2113]
- CNRS through the MITI interdisciplinary programs
- ANR STORE-EX
- French network on electrochemical energy storage (RS2E)
This research presents a solid electrolyte that can be patterned using standard lithography, providing a stable and high-conductivity option for energy storage in microelectronics. By utilizing a combination of materials, high-resolution, solid-state VN micro-super-capacitors can be fabricated on a scalable basis for single or multiple devices.
Electrochemical energy storage (EES) devices that provide high power and energy for micropower systems are considered to be essential for developing micro/nano electronics such as nanorobotics, environmental sensors, and connected smart electronics. One promising research direction in this field has been to develop on-chip EES devices whose length scales integrate with those of miniaturized electronic devices. In the work described here, we provide the first report of a hydroxide-ion-conducting solid electrolyte that can be patterned using standard lithography. By combining a negative photoresist with a polymerizable ionic liquid, weobtain a thermally and dimensionally stable, hydroxide-ion-conducting solid electrolyte with a conductivity of 10 mS cm(-1). Patterning the solid electrolyte directly on interdigitated vanadium nitride (VN) electrodes enables a scalable fabrication approach for producing high-resolution, solid-state VN micro-super-capacitors (MSC) in both single and multiple devices.
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