4.8 Article

Photopatternable hydroxide ion electrolyte for solid-state micro-supercapacitors

期刊

JOULE
卷 5, 期 9, 页码 2466-2478

出版社

CELL PRESS
DOI: 10.1016/j.joule.2021.07.003

关键词

-

资金

  1. Office of Naval Research [N00014-19-1-2113]
  2. CNRS through the MITI interdisciplinary programs
  3. ANR STORE-EX
  4. French network on electrochemical energy storage (RS2E)

向作者/读者索取更多资源

This research presents a solid electrolyte that can be patterned using standard lithography, providing a stable and high-conductivity option for energy storage in microelectronics. By utilizing a combination of materials, high-resolution, solid-state VN micro-super-capacitors can be fabricated on a scalable basis for single or multiple devices.
Electrochemical energy storage (EES) devices that provide high power and energy for micropower systems are considered to be essential for developing micro/nano electronics such as nanorobotics, environmental sensors, and connected smart electronics. One promising research direction in this field has been to develop on-chip EES devices whose length scales integrate with those of miniaturized electronic devices. In the work described here, we provide the first report of a hydroxide-ion-conducting solid electrolyte that can be patterned using standard lithography. By combining a negative photoresist with a polymerizable ionic liquid, weobtain a thermally and dimensionally stable, hydroxide-ion-conducting solid electrolyte with a conductivity of 10 mS cm(-1). Patterning the solid electrolyte directly on interdigitated vanadium nitride (VN) electrodes enables a scalable fabrication approach for producing high-resolution, solid-state VN micro-super-capacitors (MSC) in both single and multiple devices.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.8
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据