期刊
MATERIALS TODAY COMMUNICATIONS
卷 27, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.mtcomm.2021.102331
关键词
Janus tilted columns; GLAD; Co-sputtering; Electron microscopy
资金
- EIPHI Graduate School [ANR-17-EURE-0002]
- Region of Bourgogne Franche-Comte
- French RENATECH network
Janus-like W-Cu films with a tilted columnar architecture are prepared using GLAD co-sputtering, showing contrasting morphologies in column growth when facing W or Cu targets. SEM observations reveal a granular and rough aspect on the side receiving Cu atoms, while dense columns with a saw-tooth profile are formed in front of the W flux. High resolution TEM analysis supports these distinct morphologies, discussing growth mechanisms and occurrence of diverse crystallographic phases in the column cross-section.
Janus-like W-Cu films exhibiting a tilted columnar architecture are prepared by GLAD co-sputtering using W and Cu targets. Co-deposition of these two-immiscible metals leads to contrasted morphologies in the columns growth. Observations by scanning electron microscopy reveal different structural features at the micro- and nanoscales as the tilted columns face W or Cu target. In front of the W flux, columns are dense with a saw-tooth profile, whereas a granular and rough aspect is produced for the opposite side receiving Cu atoms. A finer structural analysis by high resolution transmission electron microscopy supports these different morphologies. Growth mechanisms as well as occurrence of diverse crystallographic phases (bcc alpha-W, fcc Cu and even a disordered WxCu1-x alloy despite immiscibility of W and Cu metals) through the cross-section of the columns are discussed.
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