期刊
ADVANCED MATERIALS TECHNOLOGIES
卷 6, 期 11, 页码 -出版社
WILEY
DOI: 10.1002/admt.202100650
关键词
bioelectronics; Galinstan; liquid metal; microdevices; printed electrodes
资金
- Karlsruhe Nano Micro Facility (KNMF)
- Helmholtz Research Infrastructure at Karlsruhe Institute of Technology (KIT)
- Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy [EXC-2082/1-390761711]
- Projekt DEAL
A versatile liquid metal printing process is introduced for fabrication of various fully printed devices, compatible with digital printing and thin film structuring methods for integration. The research demonstrates successful fabrication of resistors, p-n diodes, and field effect transistors, showing the potential of liquid metal printing in exceeding conventional electronic devices in printed electronics.
A versatile liquid metal (LM) printing process enabling the fabrication of various fully printed devices such as intra- and interconnect wires, resistors, diodes, transistors, and basic circuit elements such as inverters which are process compatible with other digital printing and thin film structuring methods for integration is presented. For this, a glass capillary-based direct-write method for printing LMs such as eutectic gallium alloys, exploring the potential for fully printed LM-enabled devices is demonstrated. Examples for successful device fabrication include resistors, p-n diodes, and field effect transistors. The device functionality and easiness of one integrated fabrication flow shows that the potential of LM printing is far exceeding the use of interconnecting conventional electronic devices in printed electronics.
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