相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
Anton Melnikov et al.
MOEMS AND MINIATURIZED SYSTEMS XIX (2020)
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Bert Kaisers et al.
MICROSYSTEMS & NANOENGINEERING (2019)
Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Sebastian Uhlig et al.
MICROMACHINES (2018)
Tailoring the nonlinear response of MEMS resonators using shape optimization
Lily L. Li et al.
APPLIED PHYSICS LETTERS (2017)
Microphone with Planar Nano-Gauge Detection: Fluid-Structure Coupling Including Thermoviscous Effects
T. Verdot et al.
ACTA ACUSTICA UNITED WITH ACUSTICA (2016)
Optimization of hardening/softening behavior of plane frame structures using nonlinear normal modes
Suguang Dou et al.
COMPUTERS & STRUCTURES (2016)
Structural optimization for nonlinear dynamic response
Suguang Dou et al.
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES (2015)
A Seismic-Grade Resonant MEMS Accelerometer
Xudong Zou et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2014)
Optimization and Microfabrication of High Performance Silicon-Based MEMS Microspeaker
Iman Shahosseini et al.
IEEE SENSORS JOURNAL (2013)
Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS
Binglei Wang et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2011)
What is the Young's Modulus of Silicon?
Matthew A. Hopcroft et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)
Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems
K. Das et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
The nonlinearity cancellation phenomenon in micromechanical resonators
L. C. Shao et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2008)
Building CMUTs for imaging applications from top to bottom
A. Coppa et al.
MICROELECTRONIC ENGINEERING (2007)
Dynamic pull-in phenomenon in MEMS resonators
Ali H. Nayfeh et al.
NONLINEAR DYNAMICS (2007)
A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure
Said Emre Alper et al.
SENSORS AND ACTUATORS A-PHYSICAL (2007)
Capacitive micromachined ultrasonic transducers:: Fabrication technology
AS Ergun et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2005)
Reduced-order models for MEMS applications
AH Nayfeh et al.
NONLINEAR DYNAMICS (2005)
A 5-GHz CMOS double-quadrature receiver front-end with single-stage quadrature generator
CY Wu et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2004)
Review of radio frequency microelectromechanical systems technology
S Lucyszyn
IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY (2004)
A reduced-order model for electrically actuated microbeam-based MEMS
MI Younis et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
A study of the nonlinear response of a resonant microbeam to an electric actuation
MI Younis et al.
NONLINEAR DYNAMICS (2003)
A novel NO2 gas sensor based on bis[phthalocyaninato] samarium complex/silicon hybrid charge-flow transistor
D Xie et al.
IEEE SENSORS JOURNAL (2003)
Characterization of the mechanical behavior of an electrically actuated microbeam
EM Abdel-Rahman et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2002)
MEMS-micropumps: A review
NT Nguyen et al.
JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME (2002)
Computer-aided generation of nonlinear reduced-order dynamic macromodels - II: Stress-stiffened case
JE Mehner et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)
Computer-aided generation of nonlinear reduced-order dynamic macromodels - I: Non-stress-stiffened case
LD Gabbay et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)