4.7 Article

Miura-ori structured flexible microneedle array electrode for biosignal recording

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MICROSYSTEMS & NANOENGINEERING
卷 7, 期 1, 页码 -

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SPRINGERNATURE
DOI: 10.1038/s41378-021-00259-w

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  1. Hong Kong University of Science and Technology
  2. National Natural Science Foundation of China [11874291, 12074292]

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In long-term health monitoring, a flexible MAE on a Miura-ori structured substrate demonstrates superior accuracy and long-term stability in bio-signal recordings such as ECG and EMG. The device shows enhanced performance in device reliability and air ventilation through two-directional in-plane bendability and air-circulating channels, indicating great potential in health monitoring applications.
Highly reliable signal recording with low electrode-skin impedance makes the microneedle array electrode (MAE) a promising candidate for biosignal sensing. However, when used in long-term health monitoring for some incidental diseases, flexible microneedles with perfectly skin-tight fit substrates lead to sweat accumulation inside, which will not only affect the signal output but also trigger some skin allergic reactions. In this paper, a flexible MAE on a Miura-ori structured substrate is proposed and fabricated with two-directional in-plane bendability. The results from the comparison tests show enhanced performance in terms of (1) the device reliability by resisting peeling off of the metal layer from the substrate during the operation and (2) air ventilation, achieved from the air-circulating channels, to remove sweat. Bio-signal recordings of electrocardiography (ECG), as well as electromyography (EMG) of the biceps brachii, in both static and dynamic states, are successfully demonstrated with superior accuracy and long-term stability, demonstrating the great potential in health monitoring applications.

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