期刊
MICROSYSTEMS & NANOENGINEERING
卷 7, 期 1, 页码 -出版社
SPRINGERNATURE
DOI: 10.1038/s41378-021-00271-0
关键词
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资金
- National Key Research and Development Program of China [2020YFB2009100, 2019YFB2004501]
- National Natural Science Foundation of China [91748207]
- China Postdoctoral Science Foundation [2020M683461]
- 111 Program [B12016]
The development of a flexible micro-three-dimensional temperature sensor has greatly improved stability and reliability through optimized process parameters and structural design, making it widely applicable in bio-robotics and healthcare systems. The proposed application of the sensor model in a mask can collect health information, reducing deaths caused by the lack of timely detection and treatment.
Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.
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