4.6 Article

Effects of the Ethyne Flow Ratio on Structures and Mechanical Properties of Reactive High Power Impulse Magnetron Sputtering Deposited Chromium-Carbon Films

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Materials Science, Multidisciplinary

Effect of Voltage Pulse Width and Synchronized Substrate Bias in High-Power Impulse Magnetron Sputtering of Zirconium Films

Chin-Chiuan Kuo et al.

Summary: The microstructure of Zr film is influenced by the energy of plasma species, particularly by the discharge pulse width in HiPIMS process. Increasing argon pressure and substrate biasing decreases the film growth rate, while elongating the HiPIMS pulse width alters the microstructure of films. High charged ions are found during short HiPIMS pulse width at 0.8 Pa argon, leading to changes in film structure.

COATINGS (2021)

Article Materials Science, Multidisciplinary

Reactive High-Power Impulse Magnetron Sputtering of Chromium-Carbon Films

Chin-Chivan Kuo et al.

COATINGS (2020)

Article Materials Science, Coatings & Films

Tribo-mechanical properties of CrC/a-C thin films sequentially deposited by HiPIMS and mfMS

Wolfgang Tillmann et al.

SURFACE & COATINGS TECHNOLOGY (2018)

Article Materials Science, Coatings & Films

Comparison of chromium carbide thin films grown by different power supply systems

Zheng-Long Li et al.

SURFACE & COATINGS TECHNOLOGY (2018)

Article Physics, Applied

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

Andre Anders

JOURNAL OF APPLIED PHYSICS (2017)

Article Materials Science, Coatings & Films

Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Christian Saringer et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2016)

Article Materials Science, Coatings & Films

Fabrication of diamond-like carbon films using short-pulse HiPIMS

Takumi Konishi et al.

SURFACE & COATINGS TECHNOLOGY (2016)

Article Metallurgy & Metallurgical Engineering

Electron-Beam Deposition of Chromium Carbide-Based Coatings with an Ultradispersed Structure or a Nanostructure

I. M. Poletika et al.

RUSSIAN METALLURGY (2016)

Article Materials Science, Coatings & Films

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

G. Greczynski et al.

SURFACE & COATINGS TECHNOLOGY (2014)

Review Materials Science, Multidisciplinary

Sputter deposition of transition-metal carbide films - A critical review from a chemical perspective

Ulf Jansson et al.

THIN SOLID FILMS (2013)

Article Physics, Condensed Matter

Electronic structure and chemical bonding of amorphous chromium carbide thin films

Martin Magnuson et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2012)

Article Materials Science, Multidisciplinary

Deposition and characterization of magnetron sputtered amorphous Cr-C films

Matilda Andersson et al.

VACUUM (2012)

Review Materials Science, Multidisciplinary

Atomic-level structure and structure-property relationship in metallic glasses

Y. Q. Cheng et al.

PROGRESS IN MATERIALS SCIENCE (2011)

Article Materials Science, Coatings & Films

Ion bombardment-induced nanocrystallization of magnetron-sputtered chromium carbide thin films

C. Ziebert et al.

SURFACE & COATINGS TECHNOLOGY (2011)

Article Physics, Applied

Compression and strong rarefaction in high power impulse magnetron sputtering discharges

David Horwat et al.

JOURNAL OF APPLIED PHYSICS (2010)

Article Materials Science, Multidisciplinary

Stress and texture in HIPIMS TiN thin films

R. Machunze et al.

THIN SOLID FILMS (2009)

Article Materials Science, Ceramics

Glass-forming range and glass thermal stability in binary 3d TM-C systems

E. Bauer-Grosse et al.

JOURNAL OF NON-CRYSTALLINE SOLIDS (2007)

Article Physics, Applied

Nanocomposite nc-TiC/a-C thin films for electrical contact applications

Erik Lewin et al.

JOURNAL OF APPLIED PHYSICS (2006)

Article Materials Science, Coatings & Films

Structure-property relations in Cr-C/a-C:H coatings deposited by reactive magnetron sputtering

G Gassner et al.

SURFACE & COATINGS TECHNOLOGY (2005)

Article Materials Science, Multidisciplinary

Thermal stability and crystallization studies of amorphous TM-C films

E Bauer-Grosse

THIN SOLID FILMS (2004)

Article Materials Science, Coatings & Films

Design criteria for wear-resistant nanostructured and glassy-metal

A Leyland et al.

SURFACE & COATINGS TECHNOLOGY (2004)

Article Physics, Multidisciplinary

Electronic structure and mechanical properties of Cr7C3

D Music et al.

PHYSICS LETTERS A (2004)

Article Materials Science, Coatings & Films

Cathodic chromium carbide coatings for molding die applications

J Esteve et al.

SURFACE & COATINGS TECHNOLOGY (2004)

Article Electrochemistry

Properties and preparation of amorphous chromium carbide electroplates

AA Edigaryan et al.

ELECTROCHIMICA ACTA (2002)

Article Materials Science, Multidisciplinary

Interpretation of Raman spectra of disordered and amorphous carbon

AC Ferrari et al.

PHYSICAL REVIEW B (2000)