A novel 3D printing process for glass micro-optics has been developed in this study, which can convert printed optical elements into transparent inorganic glass at low temperatures with specific performance indicators.
To meet the increasing needs of high-precision glass micro-optics and address the major limitations of current three-dimensional (3D) printing optics, we have developed a liquid, solvent-free, silica precursor and two-photon 3D printing process. The printed optical elements can be fully converted to transparent inorganic glass at temperatures as low as 600 C with a shrinkage rate of 17%. We have demonstrated the whole process, from material development, printing, and performance evaluation of the printed glass micro-optics. 3D printing of glass micro-optics with isotropic shrinkage, micrometer resol ution, low peak-to-valley deviation (<100 nm), and low surface roughness (<6 nm) has been achieved. The reported technique will enable the rapid prototyping of complex glass micro-optics previously impossible using conventional glass optics fabrication processes. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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