期刊
APPLIED SCIENCES-BASEL
卷 11, 期 13, 页码 -出版社
MDPI
DOI: 10.3390/app11136098
关键词
silicon photonics; 3D device integration; hybrid integration; optical interconnects; quantum well hybrid laser; quantum dots; WDM; CWDM; slow-light modulators; co-package
类别
资金
- Horizon 2020 Framework Programme of the European Union [688544]
The recent advances in photonic-electronic integration achieved in the European research project L3MATRIX include fabrication of 2D silicon photonics arrays, development of novel modulation schemes, integration of DFB laser sources, and demonstration of chiplet configuration for the 2D photonic arrays. These technologies will address the next generation of computing challenges.
We report recent advances in photonic-electronic integration developed in the European research project L3MATRIX. The aim of the project was to demonstrate the basic building blocks of a co-packaged optical system. Two-dimensional silicon photonics arrays with 64 modulators were fabricated. Novel modulation schemes based on slow light modulation were developed to assist in achieving an efficient performance of the module. Integration of DFB laser sources within each cell in the matrix was demonstrated as well using wafer bonding between the InP and SOI wafers. Improved semiconductor quantum dot MBE growth, characterization and gain stack designs were developed. Packaging of these 2D photonic arrays in a chiplet configuration was demonstrated using a vertical integration approach in which the optical interconnect matrix was flip-chip assembled on top of a CMOS mimic chip with 2D vertical fiber coupling. The optical chiplet was further assembled on a substrate to facilitate integration with the multi-chip module of the co-packaged system with a switch surrounded by several such optical chiplets. We summarize the features of the L3MATRIX co-package technology platform and its holistic toolbox of technologies to address the next generation of computing challenges.
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