4.7 Article

Novel Bilayer Micropyramid Structure Photonic Nanojet for Enhancing a Focused Optical Field

期刊

NANOMATERIALS
卷 11, 期 8, 页码 -

出版社

MDPI
DOI: 10.3390/nano11082034

关键词

micro-optics; thin film optics; photonic nanojet; multilayer design; microfabrication

资金

  1. China National Key RD Program [2018YFE0199200]
  2. Natural Science Basic Research Program of Shaanxi [2020JQ-805]
  3. Xi'an Key Laboratory of Intelligent Detection and Perception [201805061ZD12CG45]
  4. Key Industry Innovation Chain Project of Shaanxi Provincial Science and the Technology Department [2018ZDCXL-GY-08-02-01]
  5. School of Optoelectronic Engineering Dean's fund [2019GDYJY02]

向作者/读者索取更多资源

This study employs a designed micro-pyramidal structure to achieve free manipulation of the focused optical field, and successfully fabricates a bilayer micro-pyramidal array PNJ using multiple preparation techniques. The enhanced interference effect of the PNJ results in increased intensity and extended range of the focused light field, with the achieved focal spot width close to the diffraction limit.
In this paper, synthetically using refraction, diffraction, and interference effects to achieve free manipulation of the focused optical field, we firstly present a photonic nanojet (PNJ) generated by a micropyramid, which is combined with multilayer thin films. The theory of total internal reflection (TIR) was creatively used to design the base angle of the micropyramid, and the size parameters and material properties of the microstructure were deduced via the expected optical field distribution. The as-designed bilayer micropyramid array was fabricated by using the single-point diamond turning (SPDT) technique, nanoimprint lithography (NIL), and proportional inductively coupled plasma (ICP) etching. After the investigation, the results of optical field measurement were highly consistent with those of the numerical simulation, and they were both within the theoretical calculation range. The bilayer micropyramid array PNJ enhanced the interference effect of incident and scattered fields; thus, the intensity of the focused light field reached 33.8-times that of the initial light, and the range of the focused light field was extended to 10.08 lambda. Moreover, the full width at half maximum (FWHM) of the focal spot achieved was 0.6 lambda, which was close to the diffraction limit.

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