期刊
出版社
KOREAN SOC PRECISION ENG
DOI: 10.1007/s40684-021-00367-y
关键词
Dry film photoresist; Lithography; 3D Microfabrication; Microcantilevers; Lab-on-a-chip; Microprobes
资金
- Projekt DEAL
- Deutsche Forschungsgemeinschaft (DFG) [GRK2203 PULMOSENS]
- Bundesministerium fur Bildung und Forschung [BMBF FKZ: 13N12545]
- EFRE InfraPro project ChAMP [AN: 100330389]
The current trend in miniaturized diagnostics shows a growing demand for mobile devices for health monitoring and point-of-care diagnostics, requiring rapid and environmentally friendly microfabrication techniques. Dry film photoresists (DFPs) are considered a promising solution for low-cost and greener microfabrication, able to partly or fully replace conventional silicon technologies. This study demonstrates the potential applications of DFPs in micro-analytical devices and showcases various scenarios for their utilization.
Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP.
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